Ultra thin quartz microstrip circuit     

    Thin film microstrip circuits are widely used in dry spaceborne microwave active extensions. With the continuous improvement of satellite application frequency band and the continuous development of application fields, it is imperative to develop microstrip circuit fabrication technology for millimeter wave and terahertz (THz) frequency band. THz band refers to the band with a typical frequency range of 0.1THz ~ 10THz (wavelength 3mm ~ 30um), which coincides with millimeter wave in the long band and infrared light in the short band. It is the transition zone from electronics to photonics, which is called the "THz gap" of electromagnetic spectrum. THz has great application potential in the fields of communication, radar, characteristic spectrum detection and so onCompared with band high-speed millimeter wave wireless communication, THz communication has obvious advantages in bandwidth and can reach extremely high communication rate; Compared with the free space optical communication system, the THz band wave is far less than the optical wavelength, and is much less affected by the problems of smoke, cloud, signal alignment and so on.THz and other high-frequency applications require microwave circuit substrate materials to have stable dielectric constant, low loss and good chemical stability. There are many kinds of dielectric materials that can be used in microwave thin film circuits, but most of them can only be used in tens of GHz. Among them, quartz substrate shows excellent performance in high frequency band. Quartz material has been used by the U.S. military as the radome and antenna window of missiles since the 1950s. It has been industrialized since 1963. Quartz ceramics have high flatness, good thermal stability, low coefficient of thermal expansion, low dielectric constant, strong acid and alkali corrosion resistance, good electrical insulation and other physical and electrical properties. Since its emergence, speed has been popularized in the application of refractory and structural materials. Its application fields involve aerospace, military missile and radar, microwave antenna, steel smelting, glass manufacturing and other fields, It is a substrate material with great development potential. However, quartz material belongs to dry, hard and brittle material，It has the characteristics of high brittleness, low fracture toughness and very close elastic limit and strength of materials. These problems bring many inconveniences to circuit processing.